Multiple-electron-beam direct-write comes of age
Comparison of e-beam lithography (EBL) versus direct-write EBL. In EBL,... | Download Scientific Diagram
Direct writing - LNF Wiki
Patterning at the Resolution Limit of Commercial Electron Beam Lithography | Nano Letters
The electron beam lithography (EBL) process for biomimetic particles... | Download Scientific Diagram
Electron Optical Lithography - an overview | ScienceDirect Topics
Electron Optical Lithography - an overview | ScienceDirect Topics
All-water-based electron-beam lithography using silk as a resist | Nature Nanotechnology
Local electric field direct writing – Electron-beam lithography and mechanism - ScienceDirect
Electron-beam lithography on M108Y and M35G chemically amplified DUV photoresists - ScienceDirect
Reflective electron beam lithography: A maskless ebeam direct write lithography approach using the reflective electron beam lithography concept: Journal of Vacuum Science & Technology B: Vol 28, No 6
Concept of Electron Beam Direct Writing (EBDW) equipment with Character... | Download Scientific Diagram
Development of massively parallel electron beam direct write lithography using active-matrix nanocrystalline-silicon electron emitter arrays | Microsystems & Nanoengineering
Trehalose glycopolymer resists allow direct writing of protein patterns by electron-beam lithography | Nature Communications
Schematic illustration of electron beam lithography. Electron beam is... | Download Scientific Diagram
Direct Patterning of Zinc Sulfide on a Sub-10 Nanometer Scale via Electron Beam Lithography | ACS Nano
Understanding dose correction for high-resolution 50 kV electron-beam lithography on thick resist layers - ScienceDirect
Direct laser writing lithography using a negative-tone electron-beam resist
High speed e-beam writing for large area photonic nanostructures — a choice of parameters | Scientific Reports
PPT – Electron Beam Lithography PowerPoint presentation | free to view - id: 274f9a-ZDc1Z
L-NESS: Electron beam lithography
Micromachines | Free Full-Text | Room Temperature Direct Electron Beam Lithography in a Condensed Copper Carboxylate
Direct X-ray and electron-beam lithography of halogenated zeolitic imidazolate frameworks | Nature Materials
Comparison of e-beam lithography (EBL) versus direct-write EBL. In EBL,... | Download Scientific Diagram
Nanomaterials | Free Full-Text | Evolution in Lithography Techniques: Microlithography to Nanolithography
Electron Beam Lithography – Wisconsin Centers for Nanoscale Technology – UW–Madison
